Advanced Research Center for Nanolithography
Science Park 110 te Amsterdam
C Joost Frenken
T +31 (0)20 851 71 00
The Advanced Research Center for Nanolithography (ARCNL) is a public-private partnership between the Netherlands Organisation for Scientific Research (NWO), the University of Amsterdam (UvA), the Vrije Universiteit Amsterdam (VU) and the semiconductor equipment manufacturer ASML. ARCNL focuses on the fundamental physics and chemistry involved in current and future key technologies in nanolithography, primarily for the semiconductor industry. ARCNL’s program is intimately connected with the interests of ASML.